SEM COURSE SYLLABUS
INVESTMENT: $600 MXN
Instructors: M.C. Karla Campos Venegas, Dr. César C. Leyva Porras
Duration: 3 days: 4 hours of theory and 2 hours of hands-on practice (6 hours total).
Objective:
To develop fundamental knowledge in scanning electron microscopy (SEM) through an understanding of its theoretical principles of operation and functioning, as well as the proper preparation of samples and the correct interpretation of the results obtained.
Tuesday, May 26 (8-10 am):
1. Introduction to Scanning Electron Microscopy
• Overview of Scanning Electron Microscopy
2. Components of a Scanning Electron Microscope
• Vacuum System
• Electron Gun (W thermionic)
• Electron Column and Beam
• Condenser Lens (CL)
• Objective Lens (OL)
• Apertures
• Types of Aberrations (Astigmatism)
• Scanning Coils
3. Energy Dispersive X-ray Spectroscopy (EDS)
• Introduction to Energy Dispersive X-ray Spectroscopy (EDS)
• The EDS detector: its operation and maintenance
• Instrumental effects on the EDS spectrum
Wednesday, May 27 (8-10 am):
4. Beam-Sample Interaction
• Types of Scattering
• Interaction Volume
5. Types of Signals
• Secondary Electrons (SE)
• Backscattered Electrons (BSE)
6. Image Formation
• Scanned Area
• Magnification
7. Image Defects Associated with the Nature and Preparation of the Sample
• Loading Effect
• Radiation Damage
• Contamination
8. Sample Preparation
• Description of Basic Techniques for Sample Preparation
Thursday, May 28 (8-10 am):
9. Demonstration Practice
– Hitachi SU-3600 SEM
– JEOL JSM-7401F FESEM
